Abstract
A low-energy electron microscopy study of two-dimensional Si(001) island shapes near thermal equilibrium on $10\ifmmode\times\else\texttimes\fi{}15 \ensuremath{\mu}{\mathrm{m}}^{2}$ large single-domain terraces reveals a continuous increase of island aspect ratio and a shape transition from elliptical to ``American-football''-like with increasing island size. The size-dependent island shapes are driven by elastic relaxation caused by the intrinsic surface stress anisotropy present on Si(001). Analysis of the measured elliptical island shapes based on an elastic-model calculation allows a quantitative determination of step energies and of the surface stress anisotropy as a function of temperature.
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