Abstract
ABSTRACTBPSG films show good flow characteristics with the increase of boron and phosphorus concentration. As–deposited BPSG films with high boron and phosphorus concentration, however, have a dopant instability which results in film bursts, cracks, and precipitates, due to water absorption. Elimination of dopant instabilities of BPSG films by N2O plasma treatment is investigated. Film structure, composition and flow properties are evaluated by FT-IR, SIMS, and SEM, respectively. Dopant stability is examined after H2SO4 boiling. After H2SO4 boiling without N2O plasma treatment, BPSG films with high boron and phosphorus concentration show poor flow characteristics. Boron and phosphorus are leached out of the BPSG films by reaction with absorbed water during the H2SO4 boil. N2O plasma treatment results in a thin surface layer composed of Si-O-B bonds. These bonds do not dissolve in water. It is proposed that the thin layer consisting of Si-O-B bonds prevents the penetration of water into BPSG film during H2SO4 boiling.
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