Abstract

Strategies to deal with sample charging effects on X‐ray photoelectron spectroscopy (XPS) spectra are presented. These strategies combine charge compensation (or lack of) via a flow of electrons and an electrical connection (or lack of) of samples to the ground. Practical examples involving samples with a range of different electrical properties, sample structure/composition and sensitivity to X‐rays, illustrate the correlation between sample properties, measurement strategies, and the resulting XPS data. The most appropriate measurement strategy for a particular sample is also recommended. We highlight the crucial importance of appropriate XPS data acquisition to obtain a correct data interpretation.

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