Surface roughness measurement on machined surfaces using angular speckle correlation

Abstract

Surface roughness is of great importance in fields, such as tribology, semiconductor technology and medicine. Stylus techniques, in which a stylus is drawn along the surface and the vertical movement of the stylus is recorded, have been used traditionally in measuring surface roughness. Non-contact methods, such as optical ones, have the advantage that they can be used for the in-process measurement of surface roughness. In this paper, results of the measurement of surface roughness using angular speckle-correlation on machined surfaces are presented. Surfaces of approximately 1.6 < R a < 6.3 μm have been measured, the surfaces being classified in the same manner as when using a stylus instrument. ASC is a technique that also allows in-process measurement of the roughness of surfaces on machined surfaces. A new technique to achieve increased repeatability by using an angle detection unit is also presented in this paper.