Abstract
Surface roughness influences significantly the quality factor of high frequency nanoresonators for large frequency–relaxation times (ωτ>1) within the non-Newtonian regime, where a purely elastic dynamics develops. It is shown that the influence of short wavelength roughness, which is expressed by the roughness exponent H for the case of self-affine roughness, plays a significant role in comparison with the effect of the long wavelength roughness parameters such as the rms roughness amplitude and the lateral roughness correlation length. Therefore, the surface morphology can play an important role in designing high frequency resonators operating within the non-Newtonian regime.
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