Abstract

Ion implantation at fluences near 10 17 ions cm −2 causes roughening and loss of reflectivity on electropolished nickel surfaces. The roughening is strongly temperature sensitive, not occurring at fluences well above 10 17 ions cm −2 at T < 300°C or T ⪆ 700°C , and reaching a maximum near 600°C. The roughening is caused by pits that form at fluences near 3 × 10 17 ions cm −2, with pit overlap taking place by two to three times this fluence. Internal voids are observed in the same temperature interval as the pits but at lower fluences, and the voids act as nuclei for the pits.

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