Abstract

AbstractTo design superconducting microwave receivers, the surface resistance of the superconducting thin film must be considered. Therefore, a highly accurate technique for measuring the surface resistance of superconducting thin films should be established. In this paper, we propose a probe‐coupled microstrip line resonator as a technique for measuring the surface resistance of superconducting thin films. In the resonator technique, the surface resistance is calculated from Qu, the unloaded Q, of the resonator. Since the microstrip line resonator searches for an accurate surface resistance of the superconducting thin film, establishing a technique that accurately determines the Qu of the resonator is crucial. We measure the Qu values of resonators fabricated from metal and superconducting thin film by a probe‐coupled microstrip line resonator and describe the accuracy of Qu measurement by the probe‐coupled micro‐strip line resonator and the repeatability of the surface resistance measurement of a superconducting thin film. © 2003 Wiley Periodicals, Inc. Electron Comm Jpn Pt 2, 86(4): 27–35, 2003; Published online in Wiley InterScience (www.interscience. wiley.com). DOI 10.1002/ecjb.10035

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