Abstract
This paper presents the first attempt in correlating the low-frequency noise with the surface characteristics of metal films prepared by sputtering of copper onto oxidized-silicon and sapphire substrates. Results show that the noise behaviors and the surface physics of the metal films on these two kinds of substrates are different from each other. Particularly, the spectral slope of noise spectrum not only depends on the substrate but also on the thickness and surface area of the metal films. These observations suggest that the low-frequency noise of metal film, being governed by the surface roughness and irregularity of the sample, should be a surface effect. In addition, a number fluctuation model based on the electron tunneling between the hillocks at the surface is proposed to explain the observations.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.