Abstract
He implanted LiNbO 3 waveguides have been investigated by dark and bright line spectroscopy. The refractive index profiles were reconstructed with an improved inverse WKB procedure. In the region of electronic damage the resulting profiles are very reliable. Likewise the surface-side flank of nuclear damage induced refractive index decrease is reproduced with high accuracy. In contrast with other reconstruction schemes we determine refractive indices close to the surface with an accuracy better than 2 × 10 −4. However, the full range of nuclear damage cannot be explored. We discuss how the profile parameters depend on ion energy and irradiation dose. At 3.17 MeV the helium enriched layer seems to saturate for doses above 5 × 10 15 cm −2. Electronic damage increases the ordinary and decreases the extraordinary refractive index, more for higher doses and less for higher energies.
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