Abstract
ABSTRACTThe adsorption and reaction of dimethylzinc and diethylzinc on Si(100)-2×l surfaces was studied using temperature programmed desorption and high resolution electron energy loss spectroscopy. These zinc alkyls were found to dissociate at temperatures less than 300 K to produce adsorbed alkyl species and deposit zinc on the surface. During temperature programmed desorption zinc metal desorbed at 530 K leaving only alkyl species on the surface at higher temperatures. Surface methyl groups were found to decompose to carbon and hydrogen or desorb as methyl radicals, while surface ethyl groups underwent a series of surface reactions which resulted in three separate ethylene desorption peaks. The results of this study provide new insight into the reactions of group II metal alkyls on silicon surfaces.
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