Surface reaction of trisdimethylaminoantimony on GaSb(100)

Abstract

The decomposition of trisdimethylaminoantimony (TDMASb) on GaSb(100)-(3×1) was studied using temperature programmed desorption, temperature programmed static secondary ion mass spectroscopy, low energy electron diffraction, and X-ray photoelectron spectroscopy. Multilayers of TDMASb desorb at 220K. TDMASb decomposes on the surface at temperatures below 200K and the dimethylamino ligand desorbs through two reaction pathways, homolysis and β-hydride elimination. Homolysis of the antimony–nitrogen bond resulted in desorption of the dimethylamino radical at 380K. Methylmethyleneimine was formed and desorbed from the surface through a β-hydride elimination process at 480K. Deposition of Sb from five saturation exposures of TDMASb on GaSb(100) induced the change of surface structure from (3×1) to (1×1). Surface Sb atoms are proposed as reactive sites for the surface reaction of TDMASb on GaSb(100).