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Abstract
Surface protective films for hard disk media were studied. Whereas sputtered carbon films are not sufficiently wear-resistant for use with CaTiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> and Al <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> . TiC head sliders, tests using plasma-CVD films prepared in acetylene gas under RF or dc discharge have lubricating properties and sufficient wear resistance, but are so soft that disk surfaces are easily damaged. By combining the two in a double-layer protective film, however, both good wear resistance and low friction when used with the above types of heads are achieved.
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