Surface property change of graphene using nitrogen ion

Abstract

We introduced nitrogen ions to modify the graphene surface and its property changes wereinvestigated. A graphene layer grown on 6H-SiC(0001) was irradiated with 100 eV nitrogenions. Surface property changes were studied using photoemission spectroscopy (PES), nearedge x-ray adsorption spectroscopy (NEXAFS), and atomic force microscopy(AFM). N 1score level spectra show that three kinds of nitrogen species, nitrogen gas, graphite-like andpyridine-like nitrogen were induced on the nitrogen ion implanted graphene surface.