Abstract
The measurement of automated and fast focusing on the improvement of speed and accuracy is an important issue in industrial inspection and biomedical microscopy. In this study, we developed a novel optical imaging system in which varifocal lenses are used to characterize the 3D surface topography of samples. The performance of the proposed system was evaluated using twelve focusing algorithms. Experimental results demonstrate the feasibility and effectiveness of the proposed system in the near real-time construction of multi-focus fusion images with large depth of field from which to derive 3D surface profiles.
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