Abstract
Fizeau interferometer is the most commonly used interferometer for testing optical components. The aim of this work is to apply this technique to the measurement of elliptical Kirkpatrick-Baez (KB) mirrors during their fabrication process. KB mirrors are widely used at synchrotron radiation facilities around the world for x-ray focusing. Fizeau interferometer can provide accurate measurements for KB mirrors. Recently a KB mirror that can focus X-ray down to 150 nm has been fabricated in the Argonne National Laboratory.
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