Surface plasmonic nano-processing with template of dielectric particle array by femtosecond laser pulse

Abstract

Nano-processing by near-field optics can fabricate nano-scale structures even with near-infrared laser. The near-field can be generated by using dielectric nano-spherical particle. The dielectric particle acts as micro-lens, and then incident light is focused on the localized area. Consequently, the nano-hole can be obtained on material surface. We report new phenomena using particles, leading to a new nano-processing technique via plasmonics, even with the use of dielectric particles. The physics of nano-hole fabrication process is switchable only by the laser fluence.Nano-processing by near-field optics can fabricate nano-scale structures even with near-infrared laser. The near-field can be generated by using dielectric nano-spherical particle. The dielectric particle acts as micro-lens, and then incident light is focused on the localized area. Consequently, the nano-hole can be obtained on material surface. We report new phenomena using particles, leading to a new nano-processing technique via plasmonics, even with the use of dielectric particles. The physics of nano-hole fabrication process is switchable only by the laser fluence.