Surface Plasmon Resonance Based on ZnO Nano-grating Structure

Abstract

We have investigated the grating coupled surface plasmon resonance (GC-SPR) sensors using ZnO nano-grating structures to enhance the sensitivity of an SPR sensor. The GC-SPR sensors were analyzed using the finite-difference time-domain method. The optimum resonance angles of 49 degrees are obtained in the 150 nm wide grating structure with a period of 300 nm for the ZnO thickness of 30 nm. Then, the ZnO nano-grating patterns were fabricated by using laser interference lithography. The measured resonance angle of nano-grating patterns was around 49 degrees. Here, an enhanced evanescent field is obtained due to the surface plasmon on the edge of the bandgap when the ZnO grating structures are used to excite the surface palsmon.