Abstract
The metalorganic vapor phase epitaxy (MOVPE) growth of cubic GaN has been performed on the patterned GaAs(100) substrates which have (111)A or (111)B facets. It is found that the growth features are strongly dependent on the configuration of the pattern. It is deduced that these features come from the surface-orientation-dependent growth rate, which is in the order (111)B > (100) > (111)A, combined with the diffusion of Ga adatoms on the surface. Taking advantage of the growth on the patterned substrates, the diffusion length of the Ga adatoms on the GaAs(100) surface is estimated to be several microns in the typical case.
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