Abstract

This article presents, nano-texturing of crystalline silicon by irradiating picosecond laser with variable spatial intensity, caused by optically non-linear TiO2 nanotube arrays (TNTA). Along with micro-scale surface structure, highly ordered laser-induced periodic surface structures (LIPSS) was observed at nano-scale. The periodicity (Λ) of the LIPSS generated was near to the laser wavelength (532nm). Surface morphology at micro-level was characterized by optical microscopy (OM) and white light interferometer (WLI) and at the nano-scale by scanning electron microscope (SEM) and atomic force microscope (AFM). The results highlight the potential use of TNTA as a single step process to produce micro/nanostructures without any gas/liquid medium under ambient condition.

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