Abstract
The superconducting YBa2Cu3O7-y (YBCO) thin films were prepared on crystalline substrates by hot- wall type metal-organic chemicaf vapor deposition (MOCVD) with liquid sources. The stability of liquid sources and reproducibility of deposition enable us to observe details as the crystal growth in MOCVD. We investigated surface morphology of the samples by atomic force microscopy (AFM) and scarnning electron microscopy (SEM). From the AFM image, numerous spiral steps accompanied by screw dislocations were observed clearly. They are about 12A in height, which agrees well with one-unit cell length along the c-axis of YBCO. Terrace width of the spiral growth was growing broader and broader as the substrate temperature rises. Further, it increased as the lattice mismatch parameter decreases.
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