Abstract
Nanofilms have been grown on InP in the presence of V2O5 introduced into the system by different procedures and methods (within one procedure) and their thickness has been determined by spectral ellipsometry. The phase composition of the films has been determined by X-ray diffraction, and their surface morphology and structure have been analyzed by atomic force microscopy and transmission electron microscopy. The characteristics of the films have been shown to depend on the procedure (through the gas phase in the course of oxidation or by deposition on the surface before oxidation) and method (magnetron sputtering or deposition from gel) used to introduce the chemical stimulator into the system.
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