Abstract
Plasma immersion ion implantation (PIII) was used to implant nitrogen into Al at a temperature in the range of 320–520 °C. AlN phase was observed for temperatures above 450 °C, whereas no AIN detected by XRD diagnosis at temperatures below 380 °C. It was also observed that there was no effective increase in hardness of the material, but some wear resistance due to formation of AlN.
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