Surface Morphology and Profile Analysis for Five-Layer YBa2Cu3O7−δ Thick Films Prepared by Low-Fluorine Metallorganic Deposition

Abstract

Thick YBa2Cu3O7−δ (YBCO) films grown by metallorganic deposition (MOD) are very significant for high-performance superconducting wires. In the present work, the modified MOD method with reduced fluorine content in precursor solution (namely LF-MOD in the following) is applied to prepare the YBCO films with the purpose of reducing the processing time as well as increasing thickness. Five-layer YBCO films with a thickness of more than 2.5 μm are achieved after the effect of high-temperature annealing time (ta) on the morphology and texture of YBCO films is systematically investigated. It is suggested that an annealing time as long as 6 h appears necessary to achieve a good performance for such a thick YBCO film. To understand the evolution of texture with thickness, plasma etching is employed to characterize the profile morphology at different depths inside the films, revealing the a-axis grains together with the impurity phases arising from the incomplete reaction mostly present at the top surface only.