Abstract

The surface morphology and crystal quality of epitaxial La2-xSrxCuO4 (x≈0.15) thin films grown in situ by rf-magnetron sputtering on SrTiO3(100) substrates are examined by high resolution scanning electron microscopy (HRSEM) and reflection high-energy electron diffraction (RHEED). The surface of films grown at substrate temperatures higher than 550°C, is characterized by atomically flat grains indicative of two-dimensional growth. There are precipitates between the grains due to the off-stoichiometric film composition, which appear to prevent lateral atomic migration, and cause ditches. Despite these precipitates and ditches, these grains have high crystalline quality which is revealed by a streaky ring-shaped RHEED pattern indicating a crystal coherency extending for a few hundred µm.

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