Abstract
ABSTRACTThe morphology and composition of AlN crystals on 6H-SiC (0001) at the initial stage of crystal growth by sublimation re-condensation technique were investigated by SEM and SAM. Discontinuous AlN coverage occurred after 15 minutes growth. The AlN nuclei size, and growth rate increased as temperature increased or pressure decreased. The SiC substrate decomposed leaving hexagonal hillocks; simultaneously, the AlN nucleated on these SiC hillocks apparently rotated by 15° to 30°. The chemical composition of the substrate and different AlN crystal facets were characterized by SAM. The bare substrate area was stoichiometric SiC with insignificant conversion to silicon nitride, while Si and C preferentially incorporated in the AlN at the initial stages of growth on specific crystal planes.
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