Abstract
In this Brief Report we present a study of a 6H-SiC(0001) vicinal substrate annealed at various temperatures under ultrahigh vacuum. By combining x-ray photoelectron spectroscopy and atomic force microscopy, we investigated the morphology and the chemical surface changes accompanying the formation of graphene sheets. After annealing at $1100\text{ }\ifmmode^\circ\else\textdegree\fi{}\text{C}$ step/terrace structures of the SiC substrate are clearly identified and a terrace widening is observed due to step bunching up. At $1300\text{ }\ifmmode^\circ\else\textdegree\fi{}\text{C}$ approximately two graphene layers are formed and the surface steps completely disappear.
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