Abstract

The hydrolysis of Si3N4 powder was controlled by surface modification with Al(H2PO4)3 and Mg(H2PO4)2 with TEOS. The existence of Al(H2PO4)3 and Mg(H2PO4)2 catalyzed the hydrolysis of TEOS. From experimental results, the Si3N4 powder after surface modification exhibits a greatly-improved hydrolysis resistance than the initial Si3N4 powder in water at 60 and 120 °C. The surface modification had no clear influence on the dielectric loss of Si3N4 powders. By XPS analysis, the powders after surface modification showed the presence of P, Al, and Mg elements. It was proposed that the surface modification agent forms a strong bonding with the surface of Si3N4 particles.

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