Surface microstructures of silica glass by laser-induced backside wet etching

Abstract

We have investigated a one-step method to fabricate a microstructure on a silica glass plate using laser-induced backside wet etching (LIBWE) upon irradiation with DPSS (diode-pumped solid state) lasers. Well-defined deep microtrenches without crack formations on a fused silica glass plate were fabricated by LIBWE method. As the laser beam of DPSS UV laser at a high repetition rate up to 5 - 100 kHz is scanned on the sample surface with the galvanometer controlled by a computer for flexible operations, galvanometer-based point scanning system is suitable for a rapid prototyping process according to electronic design data in the computer. The behavior of liquid ablation (explosive vaporization) was monitored by impulse pressure detection with a fast-response piezoelectric pressure gauge. LIBWE method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass as mask-less exposure system in a conventional atmospheric environment.