Surface micromachining technology with two SU-8 structural layers and sol–gel, SU-8 or SiO2/sol–gel sacrificial layers

Abstract

The development reported herein is that of a surface micromachining technology using two SU-8 layers as a structural material. Three different processes are presented and discussed: the first process makes use of a sol–gel as the sacrificial layer; the second process utilizes the SU-8 itself as the sacrificial layer; the third process utilizes silicon dioxide as the first sacrificial layer and the sol–gel as the second sacrificial layer. These three processes are adapted for one structural layer structure. With a two-layer structure and when release is long, the third process is more adapted.