Abstract
X-ray photoelectron spectroscopy (XPS, or ESCA: Electron Spectroscopy for Chemical Analysis) and Auger Electron Spectroscopy (AES) are presently two of the three most popular techniques (with SIMS: Secondary Ion Mass Spectroscopy) used for the elemental identification of the species composing the first atomic layers of a surface. Core-loss Spectroscopy (CLS or ILS: Ionization Loss Spectroscopy) is far less popular than XPS and AES. Nevertheless it is considered here because this electron spectroscopy is based on a mechanism similar to that of XPS, it can be developed in parallel with AES and it allows also the surface elemental identification with an information depth in the nanometer range.
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