Surface Inspection of Optical and Semiconductor Components

Abstract

A laser scanning inspection gauge has been designed which enables quick objective assessment of optically polished surfaces to be carried out by relatively unskilled operators. The gauge is suitable for batch inspection of optical flats, windows and lenses over a wide range of sizes and powers. It is capable of detecting and measuring surface defects such as scratches, digs, poor polish and surface contamination and inclusions in the body of the glass, or in a cement layer. It is possible to modify the gauge to permit inspection of lenses on the block, and reflecting surfaces, including semiconductor wafers.