Abstract
The process of oxidation of single-layer and multilayer graphene films upon ultraviolet irradiation of the structure in water vapor was studied. The systematic features and distinctions between changes in the topographic and optical properties of graphene films composed of different numbers of layers were established. The possibility of surface functionalization accompanied by modification of the energy structure of graphene was shown. Differences between single-layer and multilayer graphene films in the mechanisms of oxidation on ultraviolet irradiation are discussed and analyzed. Correlation of the topographic imperfections of the properties of the graphene material with its structural defects observed in Raman spectra was shown.
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