Abstract

In this work, diamond tool turning of vertical gradient freeze (VGF) grown single crystal ZnGeP2 (ZGP) was investigated. The flatness of machined ZGP surface was measured with a Zygo interferometry to be less than λ/10 and the roughness was measured with a Taloy profilermeter to be 0.7–0.9 nm. The laser-induced damage threshold was measured with a 2.07 μm wavelength pulsed laser to be >3 J/cm2.

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