Abstract
The bending strength of a new type Reaction Sintered Silicon Carbide (RS-SiC) is about two times that of other SiC ceramics. In this research, the surface finishing of three types of SiC ceramics, RS-SiC, Pressure less Sintered Silicon Carbide (PS-SiC) and Chemical Vapour Deposition Silicon Carbide (CVD-SiC), were performed with Electrolytic In-process Dressing (ELID) mirror grinding technique. The grinding force and micro-hardness were investigated for the new type RS-SiC. It was found that the micro-hardness of the near-surface layer could increase by more than 80% under special finishing conditions. The mechanism of the 'near-surface hardening' phenomenon was discussed. In addition, a lightweight RS-SiC mirror with 250 mm in diameter was finished by ELID technique and as a result the surface roughness reached 1.5 nm Root Mean Square (RMS).
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