Abstract
In present work, a pulse-by-pulse ablation model is established to numerically predict the surface evolution by ultrafast laser ablation of fused silica, where the changes of surface morphology and ablation threshold caused by preceding pulses are taken into consideration. The present model, in which the ablation coefficient is experimentally calibrated at different pulse energies, is used to predict the sectional profiles of micro channels at different scanning velocities, repetition frequencies and scanning strategies. The causes of the predictive errors and the scope of the model are analyzed to illustrate the effectiveness of the present model.
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