Abstract

Some metal nitride thin films can exhibit resonant plasmonic characteristics that can be exploited in surface enhanced Raman spectroscopy (SERS). In this paper, we explored SERS on titanium nitride (TiN), aluminium nitride (AlN) and titanium-aluminium nitride (TiAlN) thin films produced by physical vapour deposition under vacuum. The films were compared at the same thickness (30nm). Rhodamine 6G (R6G) was used as the Raman probe molecule. The Raman spectra of these three samples showed that the SERS signal could be enhanced by 95% compared to the bare glass substrate. Oxidation of the AlN film destroyed the enhancement effect suggesting that, in these films, the enhancement was probably due to the presence of plasmon resonances on some metallic constituent.

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