Abstract

We present a continuum-based sequential multiscale dynamic model that can consider the unique dynamic behavior of a thin film with a nanosized thickness dimension. It is known that surface effects become dominant when the thickness of a thin film is scaled down to several nanometers because of the high surface-to-volume ratio of the thin film. Therefore, the natural frequencies and mode shapes of nanoelectromechanical system resonators can be significantly affected by surface effects. A finite element model considering surface effects of a nanosized thin film resonator is developed, and dynamic behavior is predicted using the proposed model by overcoming limitations of molecular dynamics simulations.

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