Abstract

A self-consistent theory for describing self bending, self equilibrium and symmetry lowering of nanofilms was proposed in this paper. The lowered symmetry and corresponding additional elastic parameter were considered to describe the mechanical properties of nanofilms. A freestanding nanofilm may spontaneously roll into a nanotube due to intrinsic surface stress imbalance. It is not necessarily isotropic for surface stress. The anisotropic surface stress is possible, Si nanofilm with (001) surface may behave (2 × 1) reconstruction, for example. The anisotropic surface stress induces anisotropic bending. And then, the isotropic Stoney formular should be modified to suit the anisotropic surface stress effect. A theory for anisotropic bending should be established. On the other hand, intrinsic surface stress balance induces uniform in-plane deformation of nanofilms. The theory in this paper was used to predict equilibrium strains of Cu, Ni, Ag, Au, Pd and Pt nanofilms, and was used to research Si nanofilm rolling behavior.

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