Abstract
Stress distribution and diamond phases in polycrystalline diamond film have been investigated by micro-Raman spectroscopy. Intensity, lineshape and peak position of the diamond Raman line largely change on the film surface, particularly if grain center and grain boundary regions are compared. Whereas in the center of the grains the characteristic diamond Raman line is observed, close to grain boundaries an additional feature at 1326 cm—1 is detected. Such a Raman component may be related to the presence of hexagonal microphases formed by a defect-induced symmetry modification of the diamond lattice. Grain boundaries appear also to be affected by a strongly anisotropic stress, which induces a frequency shift and splitting of the Raman peak. Stress configurations compatible with the experimental observations are proposed and discussed.
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