Abstract
Abstract This paper describes the surface glow-discharge effect of MgO thin films prepared by reactive radio-frequency planar magnetron sputtering on the dielectric layer of an alternating-current plasma display panel. By introducing an MgO coating on the dielectric the discharge voltage decreases sharply, although the thickness is only a few tens of Angstroms. The lowest discharge voltage is obtained for the sample prepared at a 30% O2 content in an O2+Ar gas mixture and at a sputtering gas pressure of about 5 mTorr. Moreover, high transparency (∼95%) is also obtained under the same experimental conditions. The samples prepared show more sputter-resistant properties than samples prepared by the electron-beam method and no cracks are observed on the surface after post-deposition annealing.
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