Abstract
During the past ten years a new branch of materials science has been developed. This field is called plasma-surface interaction (PSI). PSI itself is a broad field of increasing importance and includes both in situ impurity observations in different machines (i.e. deposition and erosion probes) and model experiments to understand the basic processes such as physical and chemical sputtering and recycling. This paper makes an attempt to summarize the results concerning surface deformations (blistering, exfoliation, flaking) and special pattern formation accompanying them. Mainly of the effects due to high energy bombardment (0.8–3.52 MeV) are reviewed. A theoretical explanation based on a stress model for the pattern formation is also discussed.
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