Surface defects created by low energy (20 < E < 240 eV) ion bombardment of Ge(001)

Abstract

Surface defects created on Ge(001) exposed to low energy Xe ions are characterized by in situ scanning tunneling microscopy (STM). The temperature of the sample during ion bombardment is 165 C and ion energies range from 20 to 240 eV. The ion collisions create defects (vacancies and adatoms) which nucleate and form vacancy and adatom islands. For fixed total vacancy creation, the vacancy island number density increases with increasing ion energy: the vacancy island number density is 1.6 × 10 −20 cm −2 for 40 eV ion bombardment and increases to 4.4 × 10 −20 cm −2 for 240 eV ion bombardment. The increased nucleation rate for vacancies is attributed to clustering of defects. The sputtering yield of Ge(001) is also measured by STM. The sputtering yield for 20 eV ions is approximately 10 −3 per ion but the net yield for surface defects (sum of adatoms and vacancies) is an order of magnitude higher, 10 −2, due to adatom-vacancy pair creation.