Surface defect measurement of ICF capsules under a limited depth of field

Abstract

A surface defect detection device based on null interferometric microscopy (NIM) enables the measurement of surface defects in inertial confinement fusion (ICF) capsules. However, the microscope objective with a large numerical aperture in NIM causes the depth of field (DOF) of the system to be shallow, limiting the field of view (FOV) of the measurement. To expand the measurement FOV, a reconstruction method for the defocused surface defects in the FOV is presented, the angular spectrum diffraction model from the surface to the tilted plane is established, and the phase recovery method of the defocused surface defects is proposed by the theory of angular spectrum diffraction. Both the simulated and experimental results show that the proposed method can achieve the phase recovery of the surface defects in the defocused state and expand the measurement FOV, which improves the measurement accuracy and efficiency of the surface defects of the ICF capsules.