Surface damage evolution and optical performance of beadblasted fused silica

Abstract

Optical measurements were made with improved quantitative estimation of the damage evolution of the fused silica surface. The mechanical damage was induced by a sandblasting system using spherical glass beads. Development of the surface damage was measured by the changes in the specular transmission and reflection, and by inspection using a surface profilometer and a scanning electron microscope. The changes in the transmittance versus the duration of beadblasting were measured for single fused silica slides and for a few consecutive slides. Theoretical expressions were developed to describe the stages in surface deterioration and conclusions were obtained for the fused silica surface removal mechanism.