Surface coupling of plasma optical emission spectra with bent metal-clad waveguide

Abstract

We present the design of compact bent metal-clad waveguides to collect the vertically emitted light and to transmit to the horizontal direction. The intention of the design is to collect the plasma optical emission spectra inside the semiconductor etch process chamber to monitor plasma gas phase chemistry resides in the process chamber. Coupler A has been designed for visible spectra range from 748 to 753 nm at which the maximum coupling efficiency is over 52%, while Coupler B operates at the wavelength range from 775 to 780 nm with coupling strength of 62% and Coupler C covers the visible spectrum from 808 to 813 nm with its maximum efficiency of 60%. The surface couplers reveal good spectral characteristics, considerable alignment tolerance and minimal size of 9 × 5 × 1.6 µm3 each. Relatively simple geometrical structure over conventional grating coupler is advantageous to lower the fabrication cost as well.