Abstract
A simple surface corona discharge excitation technique has been used to generate high repetition rate, high average power rare gas halide UV lamp radiation. The lamp exhibited reliable performance with very low jitter and high shot to shot reproducibility. An average power of 9 W of UV centered at 248 nm (KrF) was obtained from a small 7.0-cm-diam emitting surface. XeCl lamp lifetimes of over one billion shots were obtained on a single gas fill without the need for gas circulation or cryogenic cleanup.
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