Abstract
In this work, different morphologies of tungsten oxide films were fabricated by DC sputtering, with subsequent post-annealing treatment at different temperatures for acetone detection. The effect of post-annealing treatment of tungsten oxide films on their composition, surface morphology, structure, and chemiresistive acetone gas sensing properties was thoroughly investigated. The sensing characteristics of the fabricated sensors are modified by the post-annealing treatment due to the change of the surface morphology and chemical composition of the films. The sensor prepared at 700 °C annealing temperature (WO2.83) has higher sensitivity towards acetone; as well, it has more rapid response and recovery times.
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