Abstract
Low-pressure plasma processes were applied for cleaning the surface of glass, metals, carbon and polymers from contaminants such as air pollutants, fingerprints, coupling agents, oxide layers, weakly bonded surface layers, slip agents, light stabilizer or additive enrichments at the surface. It is possible to remove contaminations by simple plasma sputtering (particle bombardment) in plasmas of noble gases, by oxidation of organic contaminants with oxygen plasma or reduction of oxides or sulphides by hydrogen plasma. Examples were mentioned for purification of glass or glass fibre surface and the consequences for optical properties or adhesion in polymer–fibre composites. Degreasing of oil-contaminated sheet metals and removal of weakly bonded oxides were performed by plasma cleaning. The consequences of surface contamination of polymers in gluing and metallization are demonstrated.
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