Abstract
Although high resolution electron microscopy (HREM) has proved to be an invaluable tool in the study of surfaces, one critical drawback is its inability to obtain specific surface chemical state information. The ideal investigation would combine the imaging capabilities of HREM with the surface chemical information obtainable from X-ray Photon Spectroscopy (XPS) and Auger Electron Spectroscopy (AES) without exposing the sample surface to possible contaminants. We have taken a step in this regard with the addition of a new Specimen Preparation Evaluation and Analysis for Research (SPEAR) side chamber to the existing Hitachi UHV-9000 microscope, designed by Superior Vacuum Technology (Figure 1). Currently we are able to combine all of the imaging tools of HREM with surface chemical sensitivity, in an attempt to achieve the ideal surface analysis instrument.Samples are introduced and retrieved from the system through a load-lock mechanism. Pumped by a 210 Liter/sec Balzers’ Turbomolecular pump, this introduction chamber is capable of going from atmospheric pressure to 10-10 torr in four to eight hours.
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