Abstract
The surface composition of antimony-doped tin oxide films and its variation after electron bombardment and resistive heating were investigated. It was found that impurities such as carbon, potassium, sodium, calcium and chlorine segregate at the surface and that the carbon and chlorine are removed easily by electron bombardment. It is proposed that resistive heating caused the antimony to migrate rapidly to the surface at about 780°C, resulting in an antimony-rich phase which quickly reached a temperature high enough for sublimation. All substances except tin and oxygen and a trace amount of chlorine were removed. This process was accompanied by a resistivity change of the sample from 50 to 15000ω. Both electron bombardment and resistive heating above 780°C caused an increase in the tin-to- oxygen ratio as determined by Auger spectroscopy and electron spectroscopy for chemical analysis.
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